Surface modifications with radicals

•M. A. Lieberman and A. J. Lichtenberg, Principles of plasma discharges and materila processing, Wiley Interscience (2005).
•R. Hippler, S. Pfan, M. Schmidt and K. H. Schoenbach, Low temperature plasma physics, Fundamental aspects and application, Wiley – WCH (2001).
•J. R. Roth, Industrial plasma engineering, Vol. 2, Applications to non-thermal plasma processing, Inst. Of Physics Publishing (2001). E-version
•A. Ricard, Reactive plasmas, SFV, Paris (1996).
•A. Grill, Cold plasma in material fabrication, IEEE Press (1993).